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Veröffentlichungen

Buchveröffentlichungen

E. Oesterschulze, L. Abelmann, A. van den Bos, R. Kassing, N. Schwendler, G. Wittstock, Ch. Ziegler, Chapter: Sensor Technology for Scanning Probe Microscopy and New Applications, In series: Nanoscience and Technology, Edt. B. Bushan, H. Fuchs, S. Hosaka Springer Verlag, 2005.

E. Oesterschulze, Recent Developments of Probes for Scanning Probe Microscopy, In Advances in Imaging and Electron Physics, Vol. 118, pp. 129-206, Edt. P. H. Hawkes, Academic Press, Sep. 2001.

E. Oesterschulze, Sensor Technology for Scanning Probe Microscopy. In series: Nanoscience and Technology, Edt. Bh. Bushan, H. Fuchs, S. Hosaka, Springer-Verlag, Heidelberg, 2004.

 

2016

A partially wettable micromechanical resonator for chemical- and biosensing in solution; P. Peiker; S. Klingel; J. Menges; H.-J. Bart and E. Oesterschulze; Procedia Engineering 168 (2016)

Virtual mass effect in dynamic micromechanical mass sensing in liquids; P. Peiker and E. Oesterschulze; Appl. Phys. Lett. 108, 241904 (2016)

 

 

2015

Geometrically tuned wettability of dynamic micromechanical sensors for an improved in-liquid operation; P. Peiker and E. Oesterschulze; Appl. Physics Letters; 107, 101903 (2015)

 

2014

Semi-analytical modeling of a partially wetted resonant mass sensor operated in a low-loss localized eigenmode; P. Peiker and E. Oesterschulze; Journal of Appl. Physics; 115, 183510 (2014)

Suspended plate microresonators with high quality factor for the operation in liquids; J. Linden, A. Thyssen and E. Oesterschulze; Appl. Physics Letters; 104, 191906 (2014)

Integrated electrochromic aperture diaphragm; T. Deutschmann, E. Oesterschulze; Proc. SPIE 9130, Micro-Optics 2014, 913006 (2014)

Depth of focus analysis of optical systems using tunable aperture stops with a moderate level of absorption; D. Pätz, T. Deutschmann, E. Oesterschulze, St. Sinzinger; Applied Optics, 53 (28) 6508 (2014)

Integrated electrochromic iris device for low power and space-limited applications; T. Deutschmann; E. Oesterschulze; J. Opt., 16, 075301 (2014)

 

2012

Dual electrode cantilevers for ohmic microscopy, M. Ignatowitz and E. Oesterschulze, Appl. Phys. Lett. 101, 251601 (2012);

Tayloring the Interface of Hybrid Microresonators in Viscid Fluids Enhances their Quality Factor by Two Decades, Egbert Oesterschulze, Peter Kehrbusch, Bernhard Radzio, Elena Amelie Ilin, Anne Thyssen, Joachim W. Deitmer and Jenny Kehrbusch, Lab Chip, 12 (7), (2012) 1316 – 1319.

Improving the Quality Factor of Cantilevers in Vicous Fluids by the Adaptation of their Interface, J. Linden and E. Oesterschulze, Appl. Phys. Lett., 100, (2012).

2011

A method to investigate the temporal spectral response of microresonators affected by optical read-out techniques, B. Radzio, J. Kehrbusch, E.A. Ilin and E. Oesterschulze, Microelectronic Engineering, 88, 2352, 2011

Non-mechanical variable apertures based on poly(3,4-ethylenedioxythiophene) (PEDOT), S. Roth, M. Ignatowitz, P. Müller, W. Mönch, E. Oesterschulze, Microelectronic Engineering, 88, 2349, 2011,

Spray coating of PMMA for pattern transfer via electron beam lithography on surfaces with high topography, J. Linden, Ch. Thanner, B. Schaaf, S. Wolff, B. Lägel, E. Oesterschulze, Microelectronic Engineering, 88, 2030, 2011, DOI: 10.1016/j.mee.2010.12.106,

Analytical Model of the Temperature Dependent Properties of Microresonators Immersed in a Fluid, E.A. Ilin, J. Kehrbusch, B. Radzio, E. Oesterschulze, J. Appl. Phys, 109, 33519, 2011.

 

 

2010

Influence of electrode size and geometry on electrochemical experiments with combined SECM-SFM probes, Sascha E Pust, Marc Salomo, Egbert Oesterschulze and Gunther Wittstock, Nanotechnology, 21, 105709, 2010.

Fabrication and Characterization of Coaxial Scanning Nearfield Optical Microscopy Cantilever Sensors, M. Salomo, D. Bayer, B. R. Schaaf, M. Aeschlimann, E. Oesterschulze, Microelectron. Eng., DOI: 10.1016/j.mee.2009.11.031, 87, 1537-1539, 2010.

Integrated Cantilever Probes for SECM/AFM Characterization of Surfaces, M. Salomo, S.E. Pust, G. Wittstock, E. Oesterschulze, Microelectron Eng., DOI: 10.1016/j.mee.2009.11.032, 87, 1534-1536, 2010.

Columnar shaped microresonators for mass detection and gas analysis, J. Kehrbusch, P. Bozek, B. Radzio, E.A. Ilin, E. Oesterschulze, Microelectron. Eng., 87, DOI: 10.1016/j.mee.2009.11.075, 816-819, 2010.

 

 

2005 - 2009

J. Kehrbusch, E. A. Ilin, P. Bozek, B. Radzio, E. Oesterschulze, High-frequency micromechanical columnar resonators, Sci. Technol. Adv. Mater. (10) 034601, 2009.

J. Kehrbusch, E. Ilin, M. Hullin, E. Oesterschulze, High frequency columnar silicon microresonators for mass detection, Appl. Phys. Lett, 93, 023102, 2008.

A. Ambrosio, E. Cefali, S. Spadaro, S. Patene, M. Allegrini, A. Albert, E. Oesterschulze, Noncontact tuning fork position sensing for hollow-pyramid near-field cantilevered probes, Appl. Phys. Lett., 89, 163108, 2006.

A. Malave, E. Oesterschulze, All-diamond cantilever probes for scanning probe microscopy applications realized by a proximity lithography process, Rev. Sci. Inst., (77) 043708, 2006.

M. Mützel, M. Müller, D. Haubrich, U. Rasbach, D. Meschede, C. O’Dwyer, G. Gay, B. Viaris de Lesegno, J. Weiner, K. Ludolph, G. Georgiev, E. Oesterschulze, The atom pencil: serial writing in the sub-micrometre domain, Applied, Physics B, DOI 10.1007/s00340-005-1863-9, 2005.

C. O’Dwyer, G. Gay, B. Viaris de Lesegno, J. Weiner, K. Ludolph, D. Albert, E. Oesterschulze, Writing self-assembled monolayers : Optimization of atomic nanolithography imaging using self-assembled monolayers on gold substrates, J. Appl. Phys., 97, 114309, 2005.

 

 

2001 - 2004

E. Oesterschulze, W. M. Steffens, Spatio-Temporal Imaging of Voltage Pulses with an Ultrafast Scanning Probe Microscope, J. Vac. Sci. Technol. B, 19(1), 107-110, 2001.

E. Oesterschulze, G. Georgiev, M. Müller-Wiegand, A. Vollkopf, O. Rudow, Trans-mission Line Probe on Base of a Bow-Tie Antenna, Journal of Microscopy, Vol 202, Pt 1, 39-44, 2001.

A. Vollkopf, O. Rudow, E. Oesterschulze, Technology to reduce the aperture size of microfabricated aperture SNOM tips, J. of the Electrochemical Society, (148) 10, G587-G591, 2001.

O. Rudow, A. Vollkopf, M. Müller-Wiegand, G. Georgiev, E. Oesterschulze, E., Theoretical Investigations of a Coaxial Probe Concept for Scanning Near-field Optical Microscopy, Optics Communications, 189, 187-192, 2001.

C. Mihalcea, A. Hölz, M. Kuwahara, J. Tominaga, J., E. Oesterschulze, N. Atoda, N., Improved Anisotropic Deep Etching in KOH Solutions to Fabricate Highly Specular Surfaces, Microelectron. Eng., 57-58, 781-786, 2001.

E. Oesterschulze, A. Malave, U. F. Keyser, R. J. Haug, Diamond Cantilevers with Integrated Tip for Nanomachining, Diamond and Related Materials, 11, 667, 2002.

J. Regul, U.F. Keyser, M. Paesler, U. Zeitler, R.J. Haug, A. Malave, E. Oesterschulze, D. Reuter, A.D. Wieck, Fabriction of quantum point contacts by engraving GaAs/AlGaAs-heterostructures with a diamond tip, Appl. Phys. Lett., 81(11), 2023-2025, 2002.

M. Müller-Wiegand, Th. Fuhrmann, G. Georgiev, T. Spehr, E. Oesterschulze, J. Salbeck, Spinodal patterning in organic-inorganic hybrid layer systems, Appl. Phys. Lett., 81(26), 4940-4942, 2002.

M. Roemer, T. Kurzenknabe, E. Oesterschulze, N. Nicoloso, Microactuators based on Conducting Polymers, Journal of Analytical and Bioanalytical Chemistry, DOI 10.1007/s00216-002-1414-8, 2002.

M. Bonin, R. Zhu, Yvonne Klaue, J. Oberstrass, E. Oesterschulze, W. Nellen, Analysis of RNA flexibility by scanning force microscopy, Nucleic Acids Research, 30(16), 1-6, 2002.

A. Vollkopf, O. Rudow, M. Müller-Wiegand, G. Georgiev, E. Oesterschulze, Influence of the oxidation temperature on the fabrication process of silicon dioxide aperture tips, Appl. Phys. A, 76, 923-926, 2003.

G. Georgiev, M. Müller-Wiegand, A. Georgieva, K. Ludolph, E. Oesterschulze, Lithography-free fabrication of sub-100 nm structures by self-aligned plasma etching of silicon dioxide layers and silicon, J. Vac. Sci. Technol. B, 21(4), 1361-1363, 2003.

R. Kassing, E. Oesterschulze, W. Kulisch, Superhard materials in the B/C/N system and modern micro system technology: synergistic effects, Surf. Coat. Technol., 169-170, 237-244, 2003.

T. Ono, E. Oesterschulze, G. Georgiev, A. Georgieva, R. Kassing, Field-assisted assembly and alignment of carbon nanofibres, Nanotechnology, 14, 37-41, 2003.

E. Oesterschulze G. Georgiev, M. Müller-Wiegand, A. Georgieva, K. Ludolph, Fabrication of sub-wavelength surface structures combining self-assembled masking layer with plasma etching techniques, J. Vac. Sci. Technol. B, 21(6), 2496-2499, 2003.

T. Fuhrmann, J. Salbeck, N. Reinke, H. Franke, M. Müller-Wiegand, E. Oesterschulze, Holographic and Self-Organized Patterning of Semiconducting Molecular Glasses, in Proceedings of 4-th Chitose International Forum on Photonics, Science & Technology, Chitose, Japan, 2004.

1996 - 2000

E. Oesterschulze, M. Stopka, Imaging of thermal properties topography by scanning thermal scanning tunneling microscopy, Microelectr. Eng., (31) pp. 241-248, 1996.

L. Hadjiiski, S. Münster, E. Oesterschulze, R. Kassing, Neural network correction of nonlinearities in scanning probe microscope images, J. Vac. Sci. Technol B, (14)2, pp. 1563-1568, 1996.

R. Linnemann, T. Gotszalk, I. Rangelow, P. Dumania, E. Oesterschulze, Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers, J. Vac. Sci. Technol. B, (2), pp. 856-860, 1996.

C. Mihalcea, W. Scholz, S. Werner, S. Münster, E. Oesterschulze, R. Kassing, Multi-Purpose Sensor Tips for Scanning Nearfield Microscopy, Appl. Phys. Lett., (68)25 pp. 3531-3533, 1996.

E. Oesterschulze, M. Stopka, Photothermal Imaging by Scanning Thermal Microscopy, J. Vac. Sci. Technol. A, 14(3), pp. 1172-1177, 1996.

E. Oesterschulze, M. Stopka, L. Ackermann, W. Scholz, S. Werner, Thermal Imaging of Thin Films by Scanning Thermal Microscopy, J. Vac. Sci. Technol. B, (14)2, pp. 832-837, 1996.

E. Oesterschulze, W. Scholz, C. Mihalcea, D. Albert, B. Sobisch, W. Kulisch, Fabrication of Small Diamond Tips for Scanning Probe Microscopy Application, Appl. Phys. Lett, (70) pp. 435-437, 1996.

R. Kassing, E. Oesterschulze, Sensors for Scanning Probe Microscopy, in Micro/Nanotribology Its Application, Kluwer Academic Publisher, Edt. Bharat Bhushan, Series E: Applied Science, (330) pp. 35-54, 1997.

W. Kulisch, A. Malavé, G. Lippold, C. Mihalcea, E. Oesterschulze, Fabrication of Integrated Diamond Cantilevers with Tips for SPM Applications, Diamond Relat. Mat., (6), pp. 906-911, 1997.

E. Oesterschulze, The Potential of the Scanning Probe Microscopy For Thin Film Characterization, Surface Coating Technology, (97) pp. 694-706, 1997.

S. Münster, S. Werner, C. Mihalcea, W. Scholz, E. Oesterschulze, Novel micromachined cantilever sensors for scanning nearfield optical microscopy, Jour. Microscopy, (186) pp. 17-22, 1997.

M. Stopka, S. Münster, T. Leinhos, C. Mihalcea, W. Scholz, A. Leyk, W. Mertin, E. Oesterschulze, Micromachined Probes for High Frequency Scanning Force Microscopy Scanning Thermal Microscopy, SPIE proceedings, Vol. 3009-09, pp. 92-100, 1997.

S. Werner, S. Münster, S. Heisig, C. Mihalcea, W. Scholz, E. Oesterschulze, Application Characterization of Combined SNOM/SFM Cantilever Probes, SPIE proceedings, Vol. 3009-09, pp. 130-140, 1997.

W. Scholz, D. Albert, A. Malavè, S. Werner, C. Mihalcea, W. Kulisch, E. Oesterschulze, Fabrication of Monolithic Diamond Probes for Scanning Probe Microscopy Applications, SPIE proceedings, Vol. 3009-09, pp. 61-71, 1997.

S. Heisig, H. U. Danzebrink, A. Leyk, W. Mertin, S. Münster, E. Oesterschulze, Monolithic Gallium Arsenide Cantilever for Scanning Near-field Microscopy, Ultramicroscopy, (71), pp. 99-105, 1997.

M. P. Bernal, G. W. Burr, H. Coufal, R. K. Grygier, J. A. Hoffnagle, C. M. Jefferson, E. Oesterschulze, R. M. Shelby, G. T. Sincerbox, M. Quintanilla, Effects of Multilevel Phase Masks on Interpixel Cross Talk in Digital Holographic Storage, Appl. Optics, (36) pp. 3107-3115, 1997.

E. Oesterschulze, R. Kassing, Thermal Electrical Imaging of Surface Properties with High Lateral Resolution, Proceedings of the 16-th International Conference on Thermoelectrics (ICT 97), pp. 719-725, IEEE, 1997.

W. Kulisch, D. Albert, A. Malavè, W. Scholz, C. Mihalcea, S. Werner, E. Oesterschulze, Fabrication of diamond sensors for SPM applications, Paper presented at the 8th European Conference on Diamond, Diamond-Like Related Material (DIAMOND'97), Edinburgh, 1997.

E. Oesterschulze, O. Rudow, C. Mihalcea, W. Scholz, S. Werner, Cantilever Probes for SNOM Applications Double Aperture Tips, Ultramicroscopy, (71) pp. 99-105, 1998.

S. Werner, O. Rudow, C. Mihalcea, E. Oesterschulze, Cantilever Probes with Apertures Tips for Polarisation Sensitive Scanning Near-field Optical Microscopy, Appl. Phys. A, (66) pp. 367-370, 1998.

E. Oesterschulze, Novel Probes for Scanning Probe Microscopy, Appl. Phys. A, (66) pp. 3-9, 1998.

C. Mihalcea, W. Scholz, A. Malavè, D. Albert, W. Kulisch, E. Oesterschulze, Fabrication of monolithic diamond probes for scanning probe microscopy applications, Appl. Phys. A, (66) pp. 87-90, 1998.

S. Heisig, E. Oesterschulze, Gallium Arsenide Probes for Scanning Near-Field Probe Microscopy, Appl. Phys. A, (66) pp. 385-390, 1998.

E. Oesterschulze, On the Development and Potential of Cantilever-Based Probes for SNOM Applications, Optical Memory and Neural Networks, (7) 4, pp. 251-265, 1998.

T. Leinhos, M. Stopka, E. Oesterschulze, Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip, Appl. Phys. A, (66) pp. 65-69, 1998.

E. Oesterschulze, Integrated Probes for High Resolution Imaging of Surfaces, SPIE proceedings, Vol. 3467, pp. 78-88, 1998.

O. Rudow, C. Mihalcea, A. Vollkopf, M. Stopka, E. Oesterschulze, Experimental Theoretical Characterization of Aperture Probe Cantilevers for Polarisation Sensitive SNOM, SPIE proceedings, Vol. 3467, pp. 99-105, 1998.

S. Heisig, E. Oesterschulze, Optical Active Gallium Arsenide Probes for Scanning Probe Microscopy, SPIE proceedings, Vol. 3467, pp. 305-312, 1998.

A. Malavè, E. Oesterschulze, W. Kulisch, T. Trenkler, T. Hantschel, W. Vandervorst, Diamond tips cantilevers for the characterization of semiconductor devices, Diamond Rel. Mat, (8) pp. 283-287, 1998.

T. Hantschel, T. Trenkler, W. Vandervorst, A. Malavè, D. Büchel, W. Kulisch, E. Oesterschulze, Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices, Microelectronic Engineering, (46) pp. 113-116, 1998.

E. Oesterschulze, C. Mihalcea, S. Werner, S. Münster, W. Scholz, Novel Micromachined Cantilever Sensors for Scanning Nearfield Microscopy, in Atomic Force Microscopy/Scanning Tunneling Microscopy 3, Editor: S. Cohen, M. Lightbody, Kluwer Academic/Plenum Publishers, pp. 75-82, 1999.

A. Vollkopf, O. Rudow, T. Leinhos, C. Mihalcea, E. Oesterschulze, Modified Fabrication Process for Aperture Probe Cantilevers, J. Microscopy, (194 Pt 2/3) pp. 344-34, 1999.

T. Leinhos, O. Rudow, M. Stopka, A. Vollkopf, E. Oesterschulze, Coaxial Probes for Scanning Near-Field Microscopy, J. Microscopy, (194 Pt 2/3), pp. 349-352, 1999.

W. M. Steffens, S. Heisig, U. Keil, E. Oesterschulze, Spatio-temporal imaging of voltage pulses with a laser gated photoconductive sampling probe, Appl. Phys. B, 69, 455-458, 1999.

W. M. Steffens, E. Oesterschulze, Atomic force microscope cantilever for voltage probe with ultrafast time resolution, Electronic Letters, (35) 13 pp. 1106-1108,1999.

E. Oesterschulze, W. Bodensteion, D. Büchel, S. Heisig, T. Kurzenknabe, T. Leinhos, A. Malavè, C. Mihalcea, M. Müller-Wiegand, S. Neber, O. Rudow, W. M. Steffens, A. Vollkopf, R. Kassing, Micromachined Sensors for Scanning Probe Microscopy, in Sensors, Transducers Systems, Publ. AMA Service GmbH, (1) pp. 357-362, 1999.

E. Oesterschulze, W. Bodenstein, D. Büchel, K. Ewert, S. Heisig, T. Kurzenknabe, T. Leinhos, A. Malavè, C. Mihalcea, M. Müller-Wiegand, S. Neber, O. Rudow, W. Scholz, W. M. Steffens, A. Vollkopf, R. Kassing, Versatile Probes for Scanning Probe Microscopy, in: Advances in Solid State Physics, Publ. Friedr. Vieweg & Sohn Verlagsgesellschaft, Vol 39, pp 519-529, 1999.

E. Oesterschulze, I. Rangelow, R. Kassing, Maßanfertigung: Sensoren für die Rastersondenmikroskopie, Spektrum der Wissenschaft, Dezember 1999.

T. Trenkler, T. Hantschel, R. Stephenson, P. De Wolf, W. Vandervorst, L. Hellemans, A. Malavè, D. Büchel, E. Oesterschulze, W. Kulisch, P. Niedermann, T. Sulzbach, O. Ohlson, Evaluating probes for electrical atomic force microscopy, J. Vac. Sci. Technol. A, (18) 1, pp. 418-427, 2000.

C. Mihalcea, A. Vollkopf, E. Oesterschulze, Reproducible large area microfabrication of sub 100nm apertures on hollow tips, J. of the Electrochem. Society, (147) 5, 1970, 2000.

S. Heisig, O. Rudow, E. Oesterschulze, Optical Active Gallium Arsenide Cantilever Probes for Combined Scanning Near-Field Optical Microscopy and Scanning Force Microscopy, J. Vac Sci Technol. B, (18) 31, pp. 1134-1137, 2000.

M. Bonin, J. Oberstraß, N. Lukacs, K. Ewert, E. Oesterschulze, R. Kassing, W. Nellen, Determination of Preferential Binding Sites for anti dsRNA Antibodies on Double Stranded RNA by Scanning Force Microscopy, RNA (6) 563-570, 2000.

S. Heisig, O. Rudow, E. Oesterschulze, Scanning Near-Field Optical Microscopy in the near-infrared using light emitting cantilever probes, Appl. Phys. Lett, (77) 8, 1071-1073, 2000.

 

1991 - 1995

E. Oesterschulze, K. Maßeli, R. Kassing, Evaluation of Auger Electron Spectroscopy (AES) Depth Profiles by Application of Factor Analysis, Fresenius J. Anal. Chem., (341), pp 70-73, 1991.

E. Oesterschulze, M. Stopka, M. Tochtrop-Mayr, R. Kassing, Zerstörungsfreie Untersuchung der thermischen Eigenschaften von Festkörpern auf Basis der photothermischen Interferometrie, Edt. E. Köhler, in Proceedings of the 37. Internationales Wissenschaftliches Kolloquium, (2) pp 204-209, 1992.

E. Oesterschulze, M. Stopka, M. Tochtrop-Mayr, R. Kassing, Nondestructive evaluation of solids deposited films by thermal-wave interferometry, Appl. Surf. Sci. (69), pp 65-68, 1993.

M. Stopka, R. Linnemann, K. Maßeli, E. Oesterschulze, R. Kassing, Photo-thermische Raster-Nahfeld-Mikroskopie an Oberflächen und dünnen Schichten, in Laser in der Technik, präsentiert während der Laser 93, Kongreß B, München, 1993.

M. Stopka, E. Oesterschulze, R. Kassing, Photo-Thermal Characterization of Solids Thin Films by Optical Scanning Probe Techniques, Microelectr. Eng., (24) pp. 107-112, 1994.

M. Stopka E. Oesterschulze J. Schulte R. Kassing, Photothermal scanning near-field microscopy, Mater. Sci. Eng. B, (24) pp. 226-228, 1994.

L. Hadjiiski, R. Linnemann, M. Stopka, E. Oesterschulze, I. Rangelow, R. Kassing, Application of neural networks to a scanning probe microscopy system, Thin Solid Films, (264), pp 291-297, 1995.

J. Kölzer, E. Oesterschulze, G. Deboy, Thermal Imaging Measurement Techniques for Electronic Materials Devices, Microelectr. Eng., (31) pp. 251-270, 1995.

E. Oesterschulze, M. Stopka, L. Hadjiiski, R. Kassing, Investigation of Surfaces with Miniaturized Thermal Probes, Editors: O. Marti R. Möller, in Photons Local Probes, pp 345-350, Kluwer Academic Publishers, 1995.

E. Oesterschulze, L. Hadjiiski, M. Stopka, R. Kassing, Laser Interferometry SXM-Techniques for Thermal Characterization of Thin Films, Materials Science Forum, (185-188), pp. 43-52, 1995.

M. Stopka, L. Hadjiiski, E. Oesterschulze, R. Kassing, Surface investigations by scanning thermal microscopy, J. Vac. Sci. Technol. B, (13) pp. 2153-2156, 1995.