The figure gives an example. The upper part shows the ranging signal from a flat surface (at a distance of the order of 1 m), while the lower part shows the result when the laser captures a step in the surface. A step of 110 μm is clearly resolved.
Depending on the details of the laser system a ranging accuracy of the order or 1 μm or 1 mm can be achieved. With different settings of the laser parameters data rates of the order of 1 MHz can be realized.
Such a ranging system is suitable and of interest for the recording of micro as well as macro structures in industrial environment.